Advanced Energy Industries, Inc. (Nasdaq: AEIS), a global leader in precision power conversion and control technologies, has introduced the Omni™ RF diagnostic cart—a comprehensive tool designed to verify RF power delivery in critical semiconductor manufacturing processes.
The cart combines the 5540A RF power meter with PowerInsight by Advanced Energy®, an IoT-enabled data ecosystem for real-time monitoring and analysis. A single RF sensor can be configured to measure up to six different frequencies within the 0.2 to 200 MHz range, ensuring flexibility across various process requirements.
Key Features and Benefits
- Integrated 5540A RF Power Meter: Delivers precision measurements with an accuracy of ±0.5% + 0.5 W, with only annual calibrations required
- PowerInsight Interface: Enables local and remote access via LAN, HDMI, and USB-C, offering real-time monitoring, data visualization, trend tracking, and alerts
- Predictive Maintenance: Historical trend analysis and metadata logging help identify performance issues and schedule preventive maintenance
- Multi-frequency Capability: One sensor can be configured for up to six frequencies, streamlining RF calibration processes
- Operational Efficiency: Reduces tool downtime and operational costs with intuitive diagnostics and predictive analytics
"The Omni RF diagnostic cart offers a complete RF calibration and analytics solution for the semiconductor fabrication industry,” said Juergen Braun, SVP of Plasma Power Products at Advanced Energy. “It provides a highly accurate sensor and PowerInsight’s HMI with remote and local monitoring for predictive analytics and effective troubleshooting."
The Omni RF diagnostic cart enhances process control and reliability in semiconductor fabs by enabling engineers to verify, monitor, and optimize RF power delivery with unmatched accuracy and convenience.