High-Efficiency RF Power Rack for Mature Node Semiconductor Fabs
Advanced Energy Opti™ Series Now Available from FORTEC Switzerland
FORTEC Switzerland is proud to offer the new Opti™ RF Power Rack from Advanced Energy – a next-generation solution engineered to enhance performance and energy efficiency in legacy HDP-CVD semiconductor tools.
With over 70% system-level efficiency at full power, the Opti power rack is purpose-built for 200 mm high-density plasma chemical vapor deposition (HDP-CVD) tools. It delivers substantial improvements over aging legacy systems – reducing energy costs, minimizing downtime, and extending the life of mature node equipment.
Key Benefits at a Glance
- >70% system-level efficiency: Reduced operational costs and energy consumption.
- Built-in PowerInsight® dashboard: Real-time diagnostics, remote access, and predictive alerts.
- Integrated flight recorder & FastDAQ™: Enhanced troubleshooting and oscilloscope-level event capture.
- Dual-frequency support: Includes Paramount® 13.56 MHz and dual 2 MHz Paramount Plus generators.
- Front-and-rear access design: Simplifies maintenance and minimizes downtime.
Designed for Performance & Uptime
The Opti™ rack is more than just an upgrade — it’s a strategic investment for fabs and OEMs seeking to maximize yield, extend tool life, and reduce carbon footprint. Featuring intelligent monitoring, the system provides predictive alerts and real-time health diagnostics, drastically reducing troubleshooting time by up to 90%.
Whether you’re retrofitting legacy equipment or planning a strategic upgrade, the Opti™ RF Power Rack helps you meet today’s fab efficiency goals while supporting sustainability.
Interested?
Contact the FORTEC Switzerland team today to discuss how Advanced Energy’s RF power solutions can optimize your production infrastructure.