Compact Fiber Optic Thermometry Converter for Advanced Etch and Deposition
Enhanced Accuracy and Broader Temperature Range for Next-Generation Semiconductor Manufacturing
FORTEC Switzerland presents the Advanced Energy M-1200, the company’s next-generation fiber optic thermometry (FOT) converter, unveiled at SEMICON® West 2025. Designed to deliver exceptional accuracy, durability, and performance, the M-1200 sets a new benchmark for temperature measurement in advanced etch and deposition processes.
Compact, Precise, and Reliable
Engineered for semiconductor OEMs, the M-1200 combines a compact design with the robustness needed to operate reliably in harsh process environments. This enables consistent, repeatable measurements - ensuring high manufacturing quality and yield in semiconductor production.
Smaller and more accurate than most contact-based temperature sensing systems, the M-1200 provides a broad measurement range from -200 °C to +450 °C, making it ideal for the precision demands of next-generation semiconductor fabrication.
Key Features & Advantages
- Wide temperature range: -200 °C to +450 °C for diverse applications
- High measurement precision for advanced etch and deposition control
- Compact form factor for easy integration into space-constrained tools
- Ultra-fast EtherCAT communication for real-time temperature feedback
- Flexible probe configurations supporting multiple process requirements
- Proprietary phosphor formulations for optimized temperature range detection
- Rugged design built to perform in demanding semiconductor environments
Interested in Advanced Energy’s M-1200 Fiber Optic Thermometry Converter? Contact FORTEC Switzerland to learn more about integration options and how this technology can enhance precision and reliability in your semiconductor applications.